Vacuum Valves

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Spec

   

Flange Type (ISO)

KF NW25

KF NW40

KF NW50

  Fluid

 Inactive gas under vacuum

 Operating temperature(℃)

to 60

Leakage (Pa·m3/s)

  Internal

1.3×10-5 at ambient temperature, excluding gas permeation

  External

1.3×10-5 at ambient temperature, excluding gas permeation 

 Principle material

Body : STS304, Seal : EPDM

 Length (mm)

 A=87

 ​A=87

 A=101.5

 Part No. 580001580002580003

 

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