Vacuum Valves

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Spec

  

Flange Type (ISO)

KF NW40

MF(LF) 63

  Fluid

 Inactive gas under vacuum

 Operating temperature(℃)

to 60

Operating pressure

~15 PSI​

Leakage (Pa·m3/s)

  Internal

1.3×10-5 at ambient temperature, excluding gas permeation (Standard material: FKM) 

  External

1.3×10-5 at ambient temperature, excluding gas permeation (Standard material: FKM)  

 Principle material

Body : STS304, Seal : FKM

 Length (mm)

 A=86

 ​A=139