진공밸브

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Spec

   

Flange Type (ISO)

KF NW25

KF NW40

KF NW50

MF(LF) 63

 MF(LF) 80

MF(LF) 100

 MF(LF) 160

Operation Type

Manual (Handle)

  Fluid

 Inactive gas under vacuum

 Operating temperature(℃)

-15 to 80

  Operating pressure (Pa) (abs)

1 x 10 -3 ~ up to atmospheric pressure

Leakage (Pa·m3/s)

  Internal

1.3×10-5 at ambient temperature, excluding gas permeation (Standard material: EPDM) 

  External

1.3×10-5 at ambient temperature, excluding gas permeation (Standard material: EPDM)  

 Principle material

Body : STS304, Seal : EPDM 

 Length (mm)

 A=58

 ​A=58

 A=59

 A=78

 A=100

A=140

A=200

 Part No.

570201

570202

570203

570204

 570205

570206

570207

 

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