Flange Type (ISO)

KF NW16

KF NW25 

KF NW40 

KF NW50 

Operation Type

Air Open / Air Close

 Fluid

Inactive gas under vacuum

Operating temperature(℃)

 5 to 60 (High Temperature type 5 to 100)

 Operating pressure (Pa) (abs)

1 x 10 ^-9 ~ up to atmospheric pressure

Leakage (Pa·m³/s)​ 

 Internal

1.3×10^-10 at ambient temperature, excluding gas permeation (Standard material: FKM) 

 External

1.3×10^-11 at ambient temperature, excluding gas permeation (Standard material: FKM) ​

Principle material

Body : STS304, Bellows : STS316L, O-ring : FKM 

Surface treatment

EP & Anodizing 

 Pilot pressure (MPa) (G)​

 0.4~0.7

 Pilot port size

 PT M5

PT 1/8" 

 A=52 B=100

 Part No.

Angle type

Bellows Seal 

 550011

550012 

550013 

550014 

O-Ring Stem Seal 

 550111

550112 

550113 

550114 

 Part No.

In-Line Type

Bellows Seal ​ 

 560011

560012 

560013 

560014 

O-Ring Stem Seal ​

 560111

560112 

560113 

560114