진공밸브

HOME > 진공 분야 > 진공밸브

  • 제품사진

  • 제품도면

Spec

  

Flange Type (ISO)

KF NW16

KF NW25 

KF NW40 

KF NW50 

Operation Type

Manual

 Fluid

Inactive gas under vacuum

Operating temperature(℃)

 5 to 60 (High Temperature type 5 to 100)

 Operating pressure (Pa) (abs)

1 x 10 -9 ~ up to atmospheric pressure

Leakage (Pa·m3/s)

 Internal

1.3×10-10 at ambient temperature, excluding gas permeation (Standard material: FKM) 

 External

1.3×10-11 at ambient temperature, excluding gas permeation (Standard material: FKM)  

Principle material

Body : STS304, Bellows : STS316L, O-ring : FKM 

Surface treatment

EP & Anodizing 

Length (mm)

 A=52 B=100

 ​A=52 B=105​

 A=65 B=130

 A=80 B=175

 Part No.

Angle type

Bellows Seal 

 550031

550032 

550033 

550034 

O-Ring Stem Seal 

 550131

550132 

550133 

550134 

 Part No.

In-Line Type

Bellows Seal ​ 

 560031

560032 

560033 

560034 

O-Ring Stem Seal ​

 560131

560132 

560133 

560134