Flange Type (ISO)

MF(LF)63

 MF(LF)80​

 MF(LF)100​

 MF(LF)160​

Operation Type

Air Open / Air Close

 Fluid​

Inactive gas under vacuum​

 Operating temperature(℃)​

 5 to 60 (High Temperature type 5 to 100)​

 Operating pressure (Pa) (abs)​

1 x 10 -9 ~ up to atmospheric pressure​ 

Leakage (Pa·m3/s) ​​ 

 Internal​

1.3×10-10 at ambient temperature, excluding gas permeation (Standard material: FKM) ​ 

 External​

1.3×10-11 at ambient temperature, excluding gas permeation (Standard material: FKM) ​ 

Principle material​

Body : STS304, Bellows : STS316L, O-ring : FKM ​

Surface treatment​

Sanding & EP & Anodizing 

 Pilot pressure (MPa) (G)​​

 0.4~0.7

 Pilot port size​ 

PT 1/8"  

 A=100 B=200

 Part No.

Angle type

Bellows Seal 

 550005

550006 

550007 

550008 

O-Ring Stem Seal 

 550105

550106 

550107 

550108 

 Part No.

In-Line Type

Bellows Seal ​ 

 560005

560006 

560007 

560008 

O-Ring Stem Seal ​

 560105

560106 

560107 

560108