진공밸브

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Spec

 

Flange Type (ISO)

KF NW16

KF NW25 

KF NW40 

KF NW50 

Operation Type

Air Open / Spring Close (Normal Close)

Fluid

Inactive gas under vacuum

Operating temperature(℃)

 5 to 60 (High Temperature type 5 to 100)

 Operating pressure (Pa) (abs)

1 x 10 -9 ~ up to atmospheric pressure

 

Leakage (Pa·m3/s) 

 

 Internal

1.3×10-10 at ambient temperature, excluding gas permeation (Standard material: FKM)  

 External

1.3×10-11 at ambient temperature, excluding gas permeation (Standard material: FKM)  

Principle material

Body : STS304, Bellows : STS316L, O-ring : FKM  

Surface treatment

EP & Anodizing 

 Pilot pressure (MPa) (G)

 0.4~0.7

 Pilot port size 

 PT M5

PT 1/8" 

Length (mm)

A=52 B=100

 ​A=52 B=105​

 A=65 B=130

 A=80 B=175

 Part No.

Angle type

Bellows Seal 

 550001

550002 

550003 

550004 

O-Ring Stem Seal 

 550101

550102 

550103 

550104 

 Part No.

In-Line Type

Bellows Seal ​ 

 560001

560002 

560003 

560004 

O-Ring Stem Seal ​

 560101

560102 

560103 

560104