Flange Type (ISO)

MF(LF)63

MF(LF)80​

MF(LF)100​

MF(LF)160​

 MF(LF)200

MF(LF)250 

Operation Type

Air Open / Air Close

 Fluid​

Inactive gas under vacuum​

Operating temperature(℃)​

 5 to 60 (High Temperature type 5 to 100)​

 Operating pressure (Pa) (abs)​​

1 x 10 -9 ~ up to atmospheric pressure​

Leakage (Pa·m3/s) 

  Internal​

1.3×10-10 at ambient temperature, excluding gas permeation (Standard material: FKM) ​

  External​

1.3×10-11 at ambient temperature, excluding gas permeation (Standard material: FKM) ​

Principle material​

Body : STS304, Bellows : STS316L, O-ring : FKM ​

Surface treatment​

Sanding & EP & Anodizing 

  Pilot pressure (MPa) (G)​​

 0.4~0.7

  Pilot port size​

PT 1/8" 

 A=100 B=200

 A=210

 A=245

 Part No.

Angle type

Bellows Seal 

 550015

550016 

550017 

550018 

550019 

550020 

O-Ring Stem Seal 

 550115

550116 

550117 

550118 

550119 

550120 

 Part No.

In-Line Type

Bellows Seal ​ 

 560015

560016 

560017 

560018 

O-Ring Stem Seal ​

 560115

560116 

560117 

560118