Flange Type (ISO)

MF(LF)63

 MF(LF)80​

 MF(LF)100​

 MF(LF)160​

Operation Type

Manual

  Fluid​

Inactive gas under vacuum​

Operating temperature(℃)​

 5 to 60 (High Temperature type 5 to 100)​

 Operating pressure (Pa) (abs)​

1 x 10 -9 ~ up to atmospheric pressure​

Leakage (Pa·m3/s) ​

 Internal​

1.3×10-10 at ambient temperature, excluding gas permeation (Standard material: FKM) ​

 External​

1.3×10-11 at ambient temperature, excluding gas permeation (Standard material: FKM) ​ 

Principle material​

Body : STS304, Bellows : STS316L, O-ring : FKM ​ 

Surface treatment​

Sanding & EP & Anodizing 

 A=100 B=200

 Part No.

Angle type

Bellows Seal 

 550035

550036 

550037 

550038 

O-Ring Stem Seal 

 550135

550136 

550137 

550138 

 Part No.

In-Line Type

Bellows Seal ​ 

 560035

560036 

560037 

560038 

O-Ring Stem Seal ​

 560135

560136 

560137 

560138